Scanning deflectometric form measurement avoiding path-dependent angle measurement errors
نویسندگان
چکیده
منابع مشابه
Form Errors in Precision Metrology: A Survey of Measurement Techniques
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ژورنال
عنوان ژورنال: Journal of the European Optical Society: Rapid Publications
سال: 2010
ISSN: 1990-2573
DOI: 10.2971/jeos.2010.10026